GAS ABATEMENT SYSTEMS

Our solution: GABA

The semiconductor industry uses gases that are toxic, flammable and even harmful for the environment, but also for humans. For example, in the production of microchips. According to national legislation, these gases have to be abated. This means that they are reduced below the respective threshold limit value (TLV).

Different gases require different treatment technologies, such as thermal, wet or even a combination of both technologies. The process exhaust gases can then be released into the atmosphere. Without harming nature. For a greener world.

GABA AWE

Wet scrubber gas abatement for EPI processes

• Innovative wet scrubber technology
• For critical EPI processes in the semiconductor industry
• Patented inlet clogging preventer
• Extended service intervals
• No honey trap necessary to collect by-products
• Frequency-controlled venturi unit
• Four process inlets for connection to four different chambers